MEMS Devices for Scientific Applications

Norcada designs and manufactures MEMS chips for a wide range of scientific applications. These products are fabricated using our proprietary membrane platform technology and are sold world wide to high-tech companies, national labs and universities in more than 30 countries.

Transmission Electron Microscopy

Norcada designs and manufactures a wide range of MEMS devices for Transmission Electron Microscopy (TEM) applications, including low stress Silicon Nitride TEM Grids, and MEMS chips for in-situ TEM work. Please click product icon on left for additional product information.

X-Ray Microscopy:

Our product line for X-Ray microscopy applications include standard low stress silicon nitride X-Ray Windows  and MEMS chips for X-Ray Tomography work. Pleas click product icons on left for additional product information.

In-Situ Microscopy:

Norcada offers a range of MEMS products such as E-Chem chips, heating chips, liquid cells and X-ray holders for in-situ electron and X-ray microscopy work. Please click here for detailed product information.

Crystalline Silicon Membranes:

Norcada produces both single-crystalline and poly-crystalline Silicon Membranes. Single crystal silicon membranes are available in (100), (110), and (111) crystal orientations. Please click here or product icon on left for additional product information.

High Q-Factor Si3N4 Membranes:

These High-Q Si3N4 membranes are produced with stoichiometric silicon nitride films which have extremely low mechanical dissipation (high mechanical Q-factor) and low optical absorption, and are ideally suited for opto-mechanical studies. Click here or product icon on left for detailed product information.

X-Ray Transmission Windows:

High performance and low cost, Norcada’s  X-ray transmission windows are ideally suited for X-ray detector packaging and vacuum isolation applications.  Please click here or product icon on left for product information.

Custom Fabrication:

Norcada also provides custom fabrication of silicon nitride membrane windows to meet our customer’s specific requirements. Such fabrication services include non-standard sizes, thinner membranes, multi-window arrays, and windows with patterned electrodes. Please contact us to inquire about custom fabrication services.

Product Warranty:

Norcada warrants the quality of its scientific MEMS products and will replace any device deemed unusable due to fabrication defects within 90 days of purchase.