MEMS Services

MEMS Design and Fabrication:

Norcada has developed a wide range of MEMS design and fabrication capabilities over the years and has the ability to take a concept from design to prototype demonstration and small volume MEMS production in an effective and efficient manner.

MEMS Design and Testing:

• MEMS FEA modeling, numerical analysis, design layout
• MEMS device testing and characterization, failure analysis
  

MEMS Fabrication:

• Silicon Micromachining: KOH etching, ICP-RIE, wafer bonding
• Silicon on Insulator (SOI MEMS): actuators and movable structures
• Silicon on Glass (SOG): suspended silicon movable structures
• Silicon Optical Bench (SiOB), miniature optical subsystems
• Thin Film Processing: PVD, CVD, lithography, RIE and wet etch
• Thermal Processing: wafer oxidation, boron diffusion
• Post Processing: wafer dicing, wire bonding and hermetic packaging
• Thin Film Characterization: stress, thickness and dielectric constant
• Metrology: optical profilometer, surface profilometer, CD measurement, SEM