Holey Silicon Nitride Membranes

silicon nitride xray membranes and sample holders
Norcada’s Nitride WIndows individually packaged in gel capsules for ease of handling.
x-ray spectroscopy membrane windows and support films
Norcada’s Nitride Windows are carefully cleaned to minimize contamination.

 

Holey Silicon Nitride Membranes:

Our standard holey silicon nitride membranes all have a single square membrane window centered on a 200µm (NX series) thickness square silicon frame.  The membrane has a holey pattern with a regular pitch which vary from design to design. The silicon nitride membrane is fabricated with low stress (<250MPa) silicon nitride and is very robust. All of our silicon nitride membrane window devices are packaged individually in gel capsules.

 

Holey SiN Membranes with Triangular Hole Patterns

Holey pattern with triangular lattice

Holey array in a triangular pattern

Part Number: NX5050C-H3
Silicon frame: 5x5mm, 200µm thickness
SiN membrane: 0.5×0.5mm, 100nm thickness
Hole pattern: 3µm holes in a triangular pattern over 190µmx190µm area
Spacing: X=Y=4.5µm, XX=YY=9.0µm
Price: $320 USD per pack of 10 devices

Part number: NX5100C-H3
Silicon frame: 5x5mm, 200µm thickness
SiN membrane: 1x1mm, 100nm thickness
Hole pattern: 3µm holes in a triangular pattern over 780µmx780µm area
Spacing: X=Y=4.5µm, XX=YY=9.0µm
Price: $320 USD per pack of 10 devices

Part number: NX5200C-H10
Silicon frame: 5x5mm, 200µm thickness
SiN membrane: 2x2mm, 100nm thickness
Hole pattern: 10µm holes in a triangular pattern over 1.8×1.8mm area
Spacing: X=Y=15µm, XX=YY=30µm
Price: $320 USD per pack of 10 devices

Part Number: NX5050D-H3
Silicon frame: 5x5mm, 200µm thickness
SiN membrane: 0.5×0.5mm, 200nm thickness
Hole pattern: 3µm holes in a triangular pattern over 190µmx190µm area
Spacing: X=Y=4.5µm, XX=YY=9.0µm
Price: $320 USD per pack of 10 devices

Part number: NX5100D-H3
Silicon frame: 5x5mm, 200µm thickness
SiN membrane: 1x1mm, 200nm thickness
Hole pattern: 3µm holes in a triangular pattern over 780µmx780µm area
Spacing: X=Y=4.5µm, XX=YY=9.0µm
Price: $320 USD per pack of 10 devices

Part number: NX5200D-H10
Silicon frame: 5x5mm, 200µm thickness
SiN membrane: 2x2mm, 200nm thickness
Hole pattern: 10µm holes in a triangular pattern over 1.8×1.8mm area
Spacing: X=Y=15µm, XX=YY=30µm
Price: $320 USD per pack of 10 devices
 

PLEASE CLICK HERE to order above standard products.

 

Custom Fabrication:

Norcada also provides fabrication of custom designed Holey SiN membrane windows to meet our customer’s specific requirements. Such fabrication services include non-standard sizes, thinner membranes, multi-window arrays, and windows with patterned electrodes. Please contact us if you require custom fabrication.

 

Norcada warrants the quality of its products and will replace any device deemed unusable due to fabrication defects within 90 days of purchase.

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